利用晶體生長(zhǎng)模擬軟件FEMAG進(jìn)行藍(lán)寶石晶體生長(zhǎng)模擬的方法

利用晶體生長(zhǎng)模擬軟件FEMAG進(jìn)(Jin)行藍(lán)寶石晶體生長(zhǎng)模擬的方法第一頁(yè)，共三十三頁(yè)。CONFIDENTIALGeneralintroductionSapphireGrowthContent第二頁(yè)，共三十三頁(yè)。CONFIDENTIALIntroduction

Formorethan25years,FEMAGSoftdevelopssimulationsoftwarededicatedtotheresearchanddevelopmentofoptimalcrystalgrowthprocesses.1984 FirstresearchonGermaniumgrowthinUniversityofLouvain.

Prof.Fran?oisDupret1989 FirstresearchonSilicongrowthinUniversityofLouvain.1992 FirstcollaborationswithmajorICcompanies. Developmentofdefect-freesiliconwaferproduction.Today,morethan 35patentsarereferencingFEMAGSoftware2003 FEMAGSoftS.A.,spin-offfromUniversityofLouvain.2006 CollaboratrionwithmajorSolarcompanies. Developmentoflow-costandlow-oxygencontentprocesses.2009 Largeinvestmentforanewsoftwareframework 2010 ReleaseofSoftwareapplicationforSapphireingotproduction.第三頁(yè)，共三十三頁(yè)。CONFIDENTIALCzochralskiprocess第四頁(yè)，共三十三頁(yè)。CONFIDENTIALDirectionalSolidificationSystem第五頁(yè)，共三十三頁(yè)。CONFIDENTIALFloatingZoneProcess第六頁(yè)，共三十三頁(yè)。CONFIDENTIALSapphireGrowthbyCZandkyropoulos第七頁(yè)，共三十三頁(yè)。CONFIDENTIALSapphiregrowthbyHEM第八頁(yè)，共三十三頁(yè)。CONFIDENTIALWhatareFEMAGsoftware?Process-dedicatedsimulationtools,adaptedtoyourownprocessesandabletosolveyourproblems.Global

Allthefurnacecomponentsareconsidered.

Alltheheattransfermodeareconsidered(radiationtransfer,heatconduction,meltandgasconvection)InductionandohmicheatingTimeDependent第九頁(yè)，共三十三頁(yè)。CONFIDENTIALProcess-dedicatedtools

FEMAG-CZ :CzochralskiFEMAG-FZ :FloatingZoneFEMAG-VB :VerticalBridgmanFEMAG-CZ/OX :CzochralskiforSapphireFEMAG-KY :KyropoulosFEMAG-DS :DirectionalSolidificationFEMAG-HEM :HeatExchangeMethodGainoftime.ProcessmasteringAccurateandrighttothepoint第十頁(yè)，共三十三頁(yè)。CONFIDENTIALPlatformorientedFRAMEWORK:FEMAG3RADIATIONCONVECTION…MESHGEOMETRYCONDUCTIONFEMAG-CZFEMAG-HEMFEMAG-DSFEMAG-KYROPOULOSFEMAG3NEW2011Veryaccurate:FiniteElementandSpectralmethodsVeryefficient:3Dsimulationsinless1dayVeryflexible:Veryfastdevelopmentofnewdemand

…第十一頁(yè)，共三十三頁(yè)。CONFIDENTIALGlobalsimulations

CzochralskiFurnaceforSiliconHEMFurnaceforSapphireNosimplificationoftheprocessconditions第十二頁(yè)，共三十三頁(yè)。CONFIDENTIALDynamicsimulationsAdynamicsimulationtoolCompleteprocesssimulationDynamiceffectofinterfacedeformationVaryingprocessingconditions

第十三頁(yè)，共三十三頁(yè)。CONFIDENTIALSapphireCrystalGrowthSimulation

第十四頁(yè)，共三十三頁(yè)。CONFIDENTIALSapphireSimulationObjectiveThemarketofSapphireisexperiencingaveryfastgrowthrateandbecomeverycompetitiveManycompaniesinvestinsimulationsoftwareinordertoreinforcetheirpositionsHEM,CzochralskiandKyropoulosprocessrequireoptimizationandagoodunderstandingStrongneedforefficientnumericaltools.

Radiationeffectsintheparticipatingcrystalandmeltisacomplexproblem.第十五頁(yè)，共三十三頁(yè)。CONFIDENTIALSapphireSimulationObjectiveOurgoalistoprovideaccurate

simulationtool,abletotakealltheprocessfeaturesintoaccountandtooptimize

thegrowthprocessintermsoftheresultingcrystalquality.第十六頁(yè)，共三十三頁(yè)。CONFIDENTIALSapphireSimulationObjectiveKYROPULOSCZOCHRALSKIHEM第十七頁(yè)，共三十三頁(yè)。CONFIDENTIALFEMAG-CZ/OXFEMAG-CZ/OXSoftwaretosimulateSapphireGrowthbyCZandKyropoulosSpecifications:Temperatureinthesapphireand

inallfurnacecomponentsbysolvingtheglobalheattransferinthefurnace(radiation,conduction,convection).Flowvelocityinthesapphireliquidphase.Crystallizationfrontshape

OhmicandInductionHeatingAdvancedradiationheattransferinthesapphireGasconvectionAnisotropicthermalstressesinthecrystal第十八頁(yè)，共三十三頁(yè)。CONFIDENTIALTemperatureintheHotZoneFEMAG-CZ/OXCZprocess

withInductionHeatingsystemInductionHeating

system第十九頁(yè)，共三十三頁(yè)。CONFIDENTIALTemperatureinthecrystal

andinthemeltFEMAG-CZ/OXCZprocess

withInductionHeatingsystem第二十頁(yè)，共三十三頁(yè)。CONFIDENTIALMeltvelocityamplitude

FEMAG-CZ/OXCZprocess

withInductionHeatingsystemTheinterfaceshapeandpositionisaresultofthesimulation第二十一頁(yè)，共三十三頁(yè)。FEMAGSoft?2012Temperature

fieldinthemeltStream

functionFEMAG-CZ/OX/CZandKYROPOULOSprocess第二十二頁(yè)，共三十三頁(yè)。FEMAGSoft?2012Meltmeshes

BLM(boundarylayermesh)Coarse

meshBLMmeshisveryimportanttosimulatetheinterface第二十三頁(yè)，共三十三頁(yè)。FEMAGSoft?2012LocaltemperaturefieldResultusingcoarsemeshResultusingBLMmeshBLMmeshenablesabetterpredictionofthecrystalisationinterface第二十四頁(yè)，共三十三頁(yè)。FEMAGSoft?2012VelocityfieldResultusingcoarsemeshResultusingBLMmesh第二十五頁(yè)，共三十三頁(yè)。CONFIDENTIALFEMAG-HEMFEMAG-HEMSoftwaretosimulateSapphireGrowthbyHeatExchangeMethodSpecifications:Temperatureinthesapphireand

inallfurnacecomponentsbysolvingtheglobalheattransferinthefurnace(radiation,conduction,convection).Flowvelocityinthesapphireliquidphase.Crystallizationfrontshape

AdvancedradiationheattransferinthesapphireGasconvectionAnisotropicthermalstressesinthecrystal第二十六頁(yè)，共三十三頁(yè)。CONFIDENTIALFEMAG-HEMFEMAGSoftCADtooltointroducethegeometry第二十七頁(yè)，共三十三頁(yè)。CONFIDENTIALFEMAG-HEMGlobalTemperatureinthefurnace第二十八頁(yè)，共三十三頁(yè)。CONFIDENTIALFEMAG-HEMMeltconvectionDetailofmeltconvection第二十九頁(yè)，共三十三頁(yè)。CONFIDENTIALFEMAG-HEMTemperaturedistributioninthecrystalandmeltfordifferenttimesVelocityamplitudedistributioninthemeltfordifferenttimes第三十頁(yè)，共三十三頁(yè)。CONFIDENTIALAnisotropicThermalStress(HEMSapphireA-axis)FEMAG-HEMquasi-stead